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@inproceedings{TUW-111742,
    author = {Hobler, Gerhard and Selberherr, Siegfried},
    title = {{M}onte {C}arlo {S}imulation of {I}on {I}mplantation into {T}wo- and {T}hree-{D}imensional {S}tructures},
    booktitle = {{P}roceedings of the {I}nternational {W}orkshop on {N}umerical {M}odeling of {P}rocesses and {D}evices for {I}ntegrated {C}ircuits},
    year = {1988},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1987/CP1988_Hobler_1.pdf},
    note = {talk: {I}nternational {W}orkshop on {N}umerical {M}odeling of {P}rocesses and {D}evices for {I}ntegrated {C}ircuits ({N}{U}{P}{A}{D}), {S}anta {C}lara; 1988-05-09 -- 1988-05-10}
}