@phdthesis{TUW-111982, author = {Kovac, Dalibor}, title = {{M}ultiscale {M}odeling of {I}on {I}mplantation {D}amage in {S}ilicon}, school = {{I}nstitut f{\"u}r {F}estk{\"o}rperelektronik}, year = {2007} }