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@phdthesis{TUW-111982,
    author = {Kovac, Dalibor},
    title = {{M}ultiscale {M}odeling of {I}on {I}mplantation {D}amage in {S}ilicon},
    school = {{I}nstitut f{\"u}r {F}estk{\"o}rperelektronik},
    year = {2007}
}