@techreport{TUW-111988, author = {Hobler, Gerhard and Zahel, Thomas}, title = {{K}inetic {M}onte {C}arlo studies of {S}mart {C}ut technology in {S}i}, institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology}, year = {2007} }