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@article{TUW-111993,
    author = {MoberlyChan, Warren J. and Adams, David P. and Aziz, Michael J. and Hobler, Gerhard and Schenkel, Thomas},
    title = {{F}undamentals of {F}ocused {I}on {B}eam {N}anostructural {P}rocessing: {B}elow, {A}t, and {A}bove the {S}urface},
    journal = {{M}{R}{S} {B}ulletin},
    year = {2007},
    volume = {32},
    pages = {424--432}
}