@article{TUW-111993, author = {MoberlyChan, Warren J. and Adams, David P. and Aziz, Michael J. and Hobler, Gerhard and Schenkel, Thomas}, title = {{F}undamentals of {F}ocused {I}on {B}eam {N}anostructural {P}rocessing: {B}elow, {A}t, and {A}bove the {S}urface}, journal = {{M}{R}{S} {B}ulletin}, year = {2007}, volume = {32}, pages = {424--432} }