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@article{TUW-111996,
    author = {Kim, Heung-Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich},
    title = {{S}imulation-based approach for the accurate fabrication of blazed grating sturctures by {F}{I}{B}},
    journal = {{O}ptics {E}xpress},
    year = {2007},
    volume = {15},
    number = {15},
    pages = {9444--9449}
}