@article{TUW-111996, author = {Kim, Heung-Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich}, title = {{S}imulation-based approach for the accurate fabrication of blazed grating sturctures by {F}{I}{B}}, journal = {{O}ptics {E}xpress}, year = {2007}, volume = {15}, number = {15}, pages = {9444--9449} }