@article{TUW-111999, author = {Kim, Heung-Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich}, title = {{L}evel set approach for the simulation of focused ion beam processing on the micro/nano scale}, journal = {{N}anotechnology}, year = {2007}, volume = {18}, pages = {2653071--2653076} }