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@article{TUW-111999,
    author = {Kim, Heung-Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich},
    title = {{L}evel set approach for the simulation of focused ion beam processing on the micro/nano scale},
    journal = {{N}anotechnology},
    year = {2007},
    volume = {18},
    pages = {2653071--2653076}
}