@article{TUW-112000,
author = {Kim, Heung-Bae and Hobler, Gerhard and Lugstein, Alois and Bertagnolli, Emmerich},
title = {{S}imulation of ion beam induced micro/nano fabrication},
journal = {{J}ournal of {M}icromechanics and {M}icroengineering},
year = {2007},
volume = {17},
number = {1178},
pages = {1183},
doi = {10.1088/0960-1317/17/6/011}
}