@article{TUW-112003, author = {Kim, Heung-Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich}, title = {{F}ull three-dimensional simulation of focused ion beam micro/nanofabrication}, journal = {{N}anotechnology}, year = {2007}, volume = {18}, pages = {2453031--2453038} }