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@article{TUW-112003,
    author = {Kim, Heung-Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich},
    title = {{F}ull three-dimensional simulation of focused ion beam micro/nanofabrication},
    journal = {{N}anotechnology},
    year = {2007},
    volume = {18},
    pages = {2453031--2453038}
}