@mastersthesis{TUW-112198, author = {Franz, Gerhard}, title = {{Z}weidimensionale {S}imulation der {M}{O}{S}-{K}apazit{\"a}t}, school = {{I}nstitut f{\"u}r {A}llgemeine {E}lektrotechnik und {E}lektronik}, year = {1981} }