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@mastersthesis{TUW-112273,
    author = {Hobler, Gerhard},
    title = {{M}onte-{C}arlo {S}imulation der {I}onenimplantation},
    school = {{I}nstitut f{\"u}r {A}llgemeine {E}lektrotechnik und {E}lektronik},
    year = {1985}
}