@mastersthesis{TUW-112279, author = {Halama, Stefan}, title = {{U}ntersuchung der thermischen {O}xidation von {S}ilicium mit {H}ilfe molekulardynamischer {S}imulationsmethoden}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1989} }