@mastersthesis{TUW-112287, author = {Mayer, Georg}, title = {{A}nwendung des {P}{I}{F} ({P}rofile {I}nterchange {F}ormat) in der {P}roze{\ss}- und {D}evice-{S}imulation}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1990} }