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@article{TUW-112810,
    author = {Cervenka, Johann and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {S}acrificial {E}tching},
    journal = {{M}icrosystem {T}echnologies - {M}icro- and {N}anosystems - {I}nformation {S}torage and {P}rocessing {S}ystems},
    year = {2008},
    volume = {14},
    number = {4-5},
    pages = {665--671},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2008/JB2007_Cervenka_1.pdf},
    doi = {10.1007/s00542-007-0491-1}
}