@unpublished{TUW-126638, author = {Wanzenb{\"o}ck, Heinz D. and Harasek, Stefan and Hobler, Gerhard and Hutter, Herbert and St{\"o}ri, Herbert and Pongratz, Peter and Bertagnolli, Emmerich}, title = {{D}ielectric nanostructure fabricatio using a focused ion beam}, year = {2002}, note = {talk: {I}{B}{M}{M} 2002, {K}obe, {J}apan; 2002-09-01 -- 2002-09-06} }