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@article{TUW-132572,
    author = {Mayerhofer, Karl Emanuel and Foisner, Johann and Piplits, Kurt and Hobler, Gerhard and Palmetshofer, Leopold and Hutter, Herbert},
    title = {{R}ange evaluation in {S}{I}{M}{S} depth profiles of {E}r - implantations in silicon},
    journal = {{A}pplied {S}urface {S}cience},
    year = {2005},
    volume = {252},
    number = {1},
    pages = {271--277}
}