@article{TUW-132572, author = {Mayerhofer, Karl Emanuel and Foisner, Johann and Piplits, Kurt and Hobler, Gerhard and Palmetshofer, Leopold and Hutter, Herbert}, title = {{R}ange evaluation in {S}{I}{M}{S} depth profiles of {E}r - implantations in silicon}, journal = {{A}pplied {S}urface {S}cience}, year = {2005}, volume = {252}, number = {1}, pages = {271--277} }