@book{TUW-166421, editor = {Swart, J. W. and Selberherr, Siegfried and Susin, A. A. and Diniz, J. A. and Morimoto, N.}, title = {{M}icroelectronics {T}echnology and {D}evices - {S}{B}{M}{I}{C}{R}{O} 2008}, publisher = {{E}{C}{S} {T}ransactions, {T}he {E}lectrochemical {S}ociety, {V}ol.14, {N}o.1}, year = {2008}, numpages = {661}, url = {http://www.iue.tuwien.ac.at/books/SBMICRO_2008/}, isbn = {978-1-56677-646-2} }