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@book{TUW-166421,
    editor = {Swart, J. W. and Selberherr, Siegfried and Susin, A. A. and Diniz, J. A. and Morimoto, N.},
    title = {{M}icroelectronics {T}echnology and {D}evices - {S}{B}{M}{I}{C}{R}{O} 2008},
    publisher = {{E}{C}{S} {T}ransactions, {T}he {E}lectrochemical {S}ociety, {V}ol.14, {N}o.1},
    year = {2008},
    numpages = {661},
    url = {http://www.iue.tuwien.ac.at/books/SBMICRO_2008/},
    isbn = {978-1-56677-646-2}
}