@unpublished{TUW-173039, author = {Ebm, C and Budil, Matthias and Hobler, Gerhard}, title = {oe{A}ssessment of approximations for efficient topography simulation of ion beam processes: 10 ke{V} {A}r on {S}i}, year = {2008}, note = {talk: 9th {I}nternational {C}onference on {S}imulation of {R}adiation {E}ffects in {S}olids, {B}eijing, {C}hina; 2008-10-12 -- 2008-10-17} }