@incollection{TUW-173205, author = {R{\"u}denauer, Friedrich and Hobler, Gerhard and Mitterauer, Johannes and Koops, H.W.P. and Palmetshofer, L. and Bluhm, H.}, title = {{I}on beam devices for material processing and analysis}, booktitle = {{V}acuum {E}lectronics, {C}omponents and {D}evices}, year = {2008}, pages = {231--263}, publisher = {{S}pringer}, address = {{B}erlin}, isbn = {9783540719281} }