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@incollection{TUW-173205,
    author = {R{\"u}denauer, Friedrich and Hobler, Gerhard and Mitterauer, Johannes and Koops, H.W.P. and Palmetshofer, L. and Bluhm, H.},
    title = {{I}on beam devices for material processing and analysis},
    booktitle = {{V}acuum {E}lectronics, {C}omponents and {D}evices},
    year = {2008},
    pages = {231--263},
    publisher = {{S}pringer},
    address = {{B}erlin},
    isbn = {9783540719281}
}