@inproceedings{TUW-178231, author = {Ertl, Otmar and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {P}lasma {E}tching {S}imulation using {A}dvanced {R}ay {T}racing and {L}evel {S}et {T}echniques}, booktitle = {{E}{C}{S} {T}ransactions}, year = {2009}, pages = {61--68}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/CP2009_Ertl_2.pdf}, isbn = {978-1-56677-737-7}, note = {talk: {I}ntl. {S}ymposium on {M}icroelectronics {T}echnology and {D}evices ({S}{B}{M}icro), {N}atal; 2009-08-31 -- 2009-09-03} }