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@inproceedings{TUW-178231,
    author = {Ertl, Otmar and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {P}lasma {E}tching {S}imulation using {A}dvanced {R}ay {T}racing and {L}evel {S}et {T}echniques},
    booktitle = {{E}{C}{S} {T}ransactions},
    year = {2009},
    pages = {61--68},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/CP2009_Ertl_2.pdf},
    isbn = {978-1-56677-737-7},
    note = {talk: {I}ntl. {S}ymposium on {M}icroelectronics {T}echnology and {D}evices ({S}{B}{M}icro), {N}atal; 2009-08-31 -- 2009-09-03}
}