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@article{TUW-179191,
    author = {Ertl, Otmar and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {L}evel {S}et {B}ased {B}osch {P}rocess {S}imulations using {R}ay {T}racing for {F}lux {C}alculation},
    journal = {{M}icroelectronic {E}ngineering},
    year = {2010},
    volume = {87},
    number = {1},
    pages = {20--29},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/JB2009_Ertl_2.pdf},
    doi = {10.1016/j.mee.2009.05.011}
}