@article{TUW-179191, author = {Ertl, Otmar and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {L}evel {S}et {B}ased {B}osch {P}rocess {S}imulations using {R}ay {T}racing for {F}lux {C}alculation}, journal = {{M}icroelectronic {E}ngineering}, year = {2010}, volume = {87}, number = {1}, pages = {20--29}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/JB2009_Ertl_2.pdf}, doi = {10.1016/j.mee.2009.05.011} }