@article{TUW-180918, author = {Kim, Heung-Bae and Hobler, Gerhard}, title = {{I}on {B}eam {I}nduced {M}icro/{N}ano {F}abrication: {M}odeling}, journal = {{J}ournal of the {K}orean {S}ociety for {P}recision {E}ngineering}, year = {2007}, volume = {24}, number = {8}, pages = {108--115} }