@article{TUW-180919, author = {Kim, Heung-Bae and Hobler, Gerhard}, title = {{I}on {B}eam {I}nduced {M}icro/{N}ano {F}abrication: {S}hape {F}abrication}, journal = {{J}ournal of the {K}orean {S}ociety for {P}recision {E}ngineering}, year = {2007}, volume = {24}, number = {10}, pages = {109--116} }