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@article{TUW-180919,
    author = {Kim, Heung-Bae and Hobler, Gerhard},
    title = {{I}on {B}eam {I}nduced {M}icro/{N}ano {F}abrication: {S}hape {F}abrication},
    journal = {{J}ournal of the {K}orean {S}ociety for {P}recision {E}ngineering},
    year = {2007},
    volume = {24},
    number = {10},
    pages = {109--116}
}