@article{TUW-180920, author = {Ebm, C and Hobler, Gerhard}, title = {{A}ssessment of approximations for efficient topography simulation of ion beam processes: 10 ke{V} {A}r on {S}i}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {2009}, volume = {267}, pages = {2987--2990}, doi = {10.1016/j.nimb.2009.06.014} }