[Back]

@article{TUW-180920,
    author = {Ebm, C and Hobler, Gerhard},
    title = {{A}ssessment of approximations for efficient topography simulation of ion beam processes: 10 ke{V} {A}r on {S}i},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}},
    year = {2009},
    volume = {267},
    pages = {2987--2990},
    doi = {10.1016/j.nimb.2009.06.014}
}