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@article{TUW-180921,
    author = {Ebm, C and Platzgummer, E and L{\"o}schner, Hans and Eder-Kapl, Stefan and J{\"o}chl, Peter and K{\"u}mmel, Marco and Reitinger, R{\"u}diger and Hobler, Gerhard and K{\"o}ck, Anton and Hainberger, R. and Wellenzohn, Markus and Letzkus, F and Irmscher, Mathias},
    title = {{I}on multibeam nanopatterning for photonic applications: {E}xperiments and simulations, including study of precursor gas induced etching and deposition},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}},
    year = {2009},
    volume = {27},
    number = {6},
    pages = {2668--2673}
}