@article{TUW-180921, author = {Ebm, C and Platzgummer, E and L{\"o}schner, Hans and Eder-Kapl, Stefan and J{\"o}chl, Peter and K{\"u}mmel, Marco and Reitinger, R{\"u}diger and Hobler, Gerhard and K{\"o}ck, Anton and Hainberger, R. and Wellenzohn, Markus and Letzkus, F and Irmscher, Mathias}, title = {{I}on multibeam nanopatterning for photonic applications: {E}xperiments and simulations, including study of precursor gas induced etching and deposition}, journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}}, year = {2009}, volume = {27}, number = {6}, pages = {2668--2673} }