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@inproceedings{TUW-182163,
    author = {Ebm, C and Hobler, Gerhard},
    title = {{S}imulation of {I}on-beam {I}nduced {E}tching and {D}eposition {U}sing a {N}on-local {R}ecoil-based {A}lgorithm},
    booktitle = {{M}{R}{S} online {P}roceedings library},
    year = {2009},
    numpages = {6},
    note = {talk: {M}{R}{S} {S}pring {M}eeting, {S}an {F}rancisco; 2009-04-13 -- 2009-04-17}
}