@techreport{TUW-182332, author = {Zahel, Thomas and Hobler, Gerhard}, title = {{K}inetic {M}onte {C}arlo studies of {S}mart {C}ut technology in {S}i: {P}latelet model and influence of {H}e damage on platelet formation}, institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology}, year = {2008} }