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@techreport{TUW-182332,
    author = {Zahel, Thomas and Hobler, Gerhard},
    title = {{K}inetic {M}onte {C}arlo studies of {S}mart {C}ut technology in {S}i: {P}latelet model and influence of {H}e damage on platelet formation},
    institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology},
    year = {2008}
}