@techreport{TUW-182333, author = {Zahel, Thomas and Hobler, Gerhard}, title = {{I}{M}{S}{I}{L}-k{L}{M}{C}}, institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology}, year = {2009} }