@inproceedings{TUW-182572, author = {Sverdlov, Viktor and Baumgartner, Oskar and Windbacher, Thomas and Selberherr, Siegfried}, title = {{M}odeling {T}echniques for {S}trained {C}{M}{O}{S} {T}echnology}, booktitle = {216\textsuperscript{th} {E}{C}{S} {M}eeting}, year = {2009}, pages = {3--18}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/CP2009_Sverdlov_16.pdf}, isbn = {978-1-56677-744-5}, note = {invited; talk: {M}eeting of the {E}lectrochemical {S}ociety, {U}{L}{S}{I} {P}rocess {I}ntegration, {V}ienna; 2009-10-04 -- 2009-10-09} }