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@article{TUW-187974,
    author = {Ebm, C and Hobler, Gerhard and Waid, Simon and Wanzenb{\"o}ck, Heinz D.},
    title = {{M}odeling of precursor coverage in ion-beam induced etching and verification with experiments using {X}e{F}2 on {S}i{O}2},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}},
    year = {2010},
    volume = {28},
    number = {5},
    pages = {946--951},
    doi = {10.1116/1.3481139}
}