@article{TUW-187974, author = {Ebm, C and Hobler, Gerhard and Waid, Simon and Wanzenb{\"o}ck, Heinz D.}, title = {{M}odeling of precursor coverage in ion-beam induced etching and verification with experiments using {X}e{F}2 on {S}i{O}2}, journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}}, year = {2010}, volume = {28}, number = {5}, pages = {946--951}, doi = {10.1116/1.3481139} }