@techreport{TUW-194838, author = {Lorenz, J. and Clees, T. and B{\"a}r, E. and Jancke, Roland and Paschen, U. and Lang, Patrick and Salzig, C. and Klaa{\ss}en, Bernhard and Hauser, Matthias and Cervenka, Johann}, title = {{H}ierarchische {S}imulation nanoelektronischer {S}ysteme zur {B}eherrschung von {P}rozessschwankungen}, institution = {{E}360 - {I}nstitute for {M}icroelectronics; {V}ienna {U}niversity of {T}echnology}, year = {2010}, number = {M5} }