@book{TUW-196892, editor = {Omura, Y. and Gamiz, Francisco and Ishii, H. and Martino, J. A. and Nguyen, B.-Y. and Raskin, J.-P. and Selberherr, Siegfried}, title = {{A}dvanced {S}emiconductor-on-{I}nsulator {T}echnology and {R}elated {P}hysics 15}, publisher = {{E}{C}{S} {T}ransactions, {T}he {E}lectrochemical {S}ociety, {V}ol.35, {N}o.5}, year = {2011}, numpages = {333}, url = {http://www.iue.tuwien.ac.at/books/advanced_soi_technology}, isbn = {978-1-56677-866-4} }