@article{TUW-198320, author = {Lorenz, J. and B{\"a}r, E. and Clees, T. and Jancke, Roland and Salzig, C. and Selberherr, Siegfried}, title = {{H}ierarchical {S}imulation of {P}rocess {V}ariations and their {I}mpact on {C}ircuits and {S}ystems: {M}ethodology}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {2011}, volume = {58}, number = {8}, pages = {2218--2226}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/JB_Selberherr_2.pdf}, doi = {10.1109/TED.2011.2150225}, note = {invited} }