@article{TUW-202614, author = {Budil, Matthias and Hobler, Gerhard}, title = {{T}opography simulation of sputtering using an algorithm with second order approximation in space}, journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}}, year = {2011}, volume = {269}, pages = {1614--1618} }