@article{TUW-202616, author = {Hobler, Gerhard and Kovac, Dalibor}, title = {{D}ynamic binary collision simulation of focused ion beam milling of deep trenches}, journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}}, year = {2011}, volume = {269}, pages = {1609--1613} }