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@article{TUW-202616,
    author = {Hobler, Gerhard and Kovac, Dalibor},
    title = {{D}ynamic binary collision simulation of focused ion beam milling of deep trenches},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}},
    year = {2011},
    volume = {269},
    pages = {1609--1613}
}