[Back]

@article{TUW-202618,
    author = {Ebm, C and Hobler, Gerhard and Waid, Simon and Wanzenb{\"o}ck, Heinz D.},
    title = {{Q}uantitative simulation of ion-beam induced deposition of nanostructures},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}},
    year = {2011},
    volume = {29},
    number = {1},
    pages = {0110311--0110315},
    doi = {10.1116/1.3533951}
}