@article{TUW-202618, author = {Ebm, C and Hobler, Gerhard and Waid, Simon and Wanzenb{\"o}ck, Heinz D.}, title = {{Q}uantitative simulation of ion-beam induced deposition of nanostructures}, journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}}, year = {2011}, volume = {29}, number = {1}, pages = {0110311--0110315}, doi = {10.1116/1.3533951} }