@mastersthesis{TUW-208189, author = {Wimmer, Yannick}, title = {{U}ntersuchung neuartiger {S}i{N}x-{A}ntireflexschichten f{\"u}r {S}ilizium-{S}olarzellen}, school = {{A}tominstitut}, year = {2012}, keywords = {silicon solar cells, antireflection coating, {S}i{N}x, silicon nitride} }