@inproceedings{TUW-208672, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{S}imulation of {S}ilicon {N}anopatterning {U}sing nc-{A}{F}{M}}, booktitle = {{A}bstracts 15th {I}nternational {C}onference on non-contact {A}tomic {F}orce {M}icroscopy (nc-{A}{F}{M})}, year = {2012}, pages = {108}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/CP2012_Filipovic_1.pdf}, note = {poster presentation: {I}nternational {C}onference on non-contact {A}tomic {F}orce {M}icroscopy, {C}esky {K}rumlov; 2012-07-01 -- 2012-07-05} }