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@article{TUW-209715,
    author = {Kim, Heung Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich and Platzgummer, E and L{\"o}schner, Hans},
    title = {{S}putter-{R}edeposition {M}ethod for the {F}abrication of {A}utomatically {S}ealed {M}icro/{N}anochannel using {F}{I}{B}s},
    journal = {{I}nternational {J}ournal {O}f {P}recision {E}ngineering {A}nd {M}anufacturing},
    year = {2012},
    volume = {12},
    number = {5},
    pages = {893--898},
    doi = {10.1007/s12541-011-0119-3}
}