@article{TUW-209715, author = {Kim, Heung Bae and Hobler, Gerhard and Steiger-Thirsfeld, Andreas and Lugstein, Alois and Bertagnolli, Emmerich and Platzgummer, E and L{\"o}schner, Hans}, title = {{S}putter-{R}edeposition {M}ethod for the {F}abrication of {A}utomatically {S}ealed {M}icro/{N}anochannel using {F}{I}{B}s}, journal = {{I}nternational {J}ournal {O}f {P}recision {E}ngineering {A}nd {M}anufacturing}, year = {2012}, volume = {12}, number = {5}, pages = {893--898}, doi = {10.1007/s12541-011-0119-3} }