@inproceedings{TUW-209877, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{E}lectric {F}ield {B}ased {S}imulations of {L}ocal {O}xidation {N}anolithography using {A}tomic {F}orce {M}icroscopy in a {L}evel {S}et {E}nvironment}, booktitle = {{E}{C}{S} {T}ransactions}, year = {2012}, pages = {265--272}, publisher = {49}, address = {1}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2012_Filipovic_2.pdf}, isbn = {978-1-56677-990-6}, doi = {10.1149/04901.0265ecst}, note = {talk: {I}ntl. {S}ymposium on {M}icroelectronics {T}echnology and {D}evices ({S}{B}{M}icro), {B}rasilia, {B}razil; 2012-08-30 -- 2012-09-02} }