@article{TUW-211832, author = {Lindsey, Sloan and Hobler, Gerhard}, title = {{T}he significance of redeposition and backscattering in nanostructure formation by focused ion beams}, journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}}, year = {2012}, volume = {282}, pages = {12--16}, doi = {10.1016/j.nimb.2011.08.051} }