@unpublished{TUW-212452, author = {Waid, Simon and Mika, Johann and Lindsey, Sloan and Wanzenb{\"o}ck, Heinz D. and Hobler, Gerhard and Bertagnolli, Emmerich}, title = {{F}abrication of 3{D} {A}xon {I}solation {C}hannels by {I}nverse {M}odelling {A}ssisted {F}ocused {I}on {B}eam {P}atterning}, year = {2012}, note = {poster presentation: {M}icro- and {N}ano-{E}ngineering {C}onference, {T}oulouse, {F}rance; 2012-09-16 -- 2012-09-20} }