[Back]

@incollection{TUW-212683,
    author = {Kim, Heung Bae and Hobler, Gerhard},
    title = {{S}imulation of {F}ocused {I}on {B}eam {M}illing},
    booktitle = {{N}anofabrication {U}sing {F}ocused {I}on and {E}lectron {B}eam},
    year = {2012},
    editor = {Utke, Ivo and Moshkalev, Stanislav and Russell, Ph.St.J.},
    pages = {226--247},
    publisher = {{O}xford {U}niversity {P}ress},
    isbn = {9780199734214}
}