@incollection{TUW-212683, author = {Kim, Heung Bae and Hobler, Gerhard}, title = {{S}imulation of {F}ocused {I}on {B}eam {M}illing}, booktitle = {{N}anofabrication {U}sing {F}ocused {I}on and {E}lectron {B}eam}, year = {2012}, editor = {Utke, Ivo and Moshkalev, Stanislav and Russell, Ph.St.J.}, pages = {226--247}, publisher = {{O}xford {U}niversity {P}ress}, isbn = {9780199734214} }