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@phdthesis{TUW-214121,
    author = {Filipovic, Lado},
    title = {{T}opography {S}imulation of {N}ovel {P}rocessing {T}echniques},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2012},
    url = {http://www.iue.tuwien.ac.at/phd/filipovic/}
}