@unpublished{TUW-215349, author = {Hobler, Gerhard}, title = {{S}imulation of {N}anostructuring with {F}ocused {I}on {B}eams}, year = {2010}, note = {invited; talk: {F}{I}{B}-{W}orkshop, {W}ien; 2010-06-28 -- 2010-06-29} }