@techreport{TUW-215370, author = {Lindsey, Sloan and Hobler, Gerhard and Rue, C and Maazouz, M}, title = {{F}ocused {I}on {B}eam {S}imulation - {I}nvestigation of the {C}urtaining {E}ffect in {T}{E}{M} {S}ample {P}reparation}, institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology}, year = {2012} }