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@techreport{TUW-215370,
    author = {Lindsey, Sloan and Hobler, Gerhard and Rue, C and Maazouz, M},
    title = {{F}ocused {I}on {B}eam {S}imulation - {I}nvestigation of the {C}urtaining {E}ffect in {T}{E}{M} {S}ample {P}reparation},
    institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology},
    year = {2012}
}