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@article{TUW-217450,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{A} {M}ethod for {S}imulating {A}tomic {F}orce {M}icroscope {N}anolithography in the {L}evel {S}et {F}ramework},
    journal = {{M}icroelectronic {E}ngineering},
    year = {2013},
    volume = {107},
    pages = {23--32},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/JB2013_Filipovic_1.pdf},
    doi = {10.1016/j.mee.2013.02.083}
}