@article{TUW-217450, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{A} {M}ethod for {S}imulating {A}tomic {F}orce {M}icroscope {N}anolithography in the {L}evel {S}et {F}ramework}, journal = {{M}icroelectronic {E}ngineering}, year = {2013}, volume = {107}, pages = {23--32}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/JB2013_Filipovic_1.pdf}, doi = {10.1016/j.mee.2013.02.083} }