@inproceedings{TUW-217740, author = {Singulani, Anderson P. and Ceric, Hajdin and Filipovic, Lado and Langer, Erasmus}, title = {{I}mpact of {B}osch {S}callops {D}imensions on {S}tress of an {O}pen {T}hrough {S}ilicon {V}ia {T}echnology}, booktitle = {{P}roceedings of the {I}{E}{E}{E} 14th {I}nternational {C}onference on {T}hermal, {M}echanical {\&} {M}ulti-{P}hysics {S}imulation and {E}xperiments in {M}icroelectronics and {M}icrosystems ({E}ur{S}im{E})}, year = {2013}, numpages = {6}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2013_Singulani_1.pdf}, isbn = {978-1-4673-6137-8}, doi = {10.1109/EuroSimE.2013.6529938}, note = {talk: {I}nternational {C}onference on {T}hermal, {M}echanical and {M}ulti-{P}hysics {S}imulation and {E}xperiments in {M}icroelectronics and {M}icrosystems, {P}oland; 2013-04-14 -- 2013-04-17} }