@inproceedings{TUW-217815, author = {Schrems, Martin and Schrank, Clemens and Siegert, Joerg and Kraft, J. and Teva, Jordi and Selberherr, Siegfried}, title = {{M}etrology {R}equirements for {M}anufacturing 3{D} {I}ntegrated {I}{C}s}, booktitle = {{P}roceedings {I}nternational {C}onference on {F}rontiers of {C}haracterization and {M}etrology for {N}anoelectronics ({F}{C}{M}{N})}, year = {2013}, pages = {137--139}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2013_Selberherr_1.pdf}, note = {invited; talk: {I}nternational {C}onference on {F}rontiers of {C}haracterization and {M}etrology for {N}anoelectronics ({F}{C}{M}{N}), {G}aithersburg, {U}{S}{A}; 2013-03-25 -- 2013-03-28} }