@book{TUW-218100, editor = {Omura, Y. and Gamiz, Francisco and Nguyen, B.-Y. and Ishii, H. and Martino, J. A. and Selberherr, Siegfried and Raskin, J.-P.}, title = {{A}dvanced {S}emiconductor-on-{I}nsulator {T}echnology and {R}elated {P}hysics 16}, publisher = {{E}{C}{S} {T}ransactions, {T}he {E}lectrochemical {S}ociety, {V}ol.53, {N}o.5}, year = {2013}, numpages = {220}, url = {http://www.iue.tuwien.ac.at/books/advanced_soi_technology_16}, isbn = {978-1-62332-027-0} }