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@article{TUW-219517,
    author = {Lindsey, Sloan and Hobler, Gerhard},
    title = {{S}puttering of silicon at glancing incidence},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}},
    year = {2013},
    volume = {303},
    pages = {142--147},
    doi = {10.1016/j.nimb.2012.12.087}
}