@article{TUW-219517, author = {Lindsey, Sloan and Hobler, Gerhard}, title = {{S}puttering of silicon at glancing incidence}, journal = {{N}uclear {I}nstruments {\&} {M}ethods in {P}hysics {R}esearch {S}ection {B}}, year = {2013}, volume = {303}, pages = {142--147}, doi = {10.1016/j.nimb.2012.12.087} }